Silicon MOSFET / Field Emission Arrays Fabricated Using CMP
نویسنده
چکیده
We report the integration of a MOSFET with a field emission arrays to obtain low voltage switching and more stable emission in field emission devices. Instead of the traditional feedback resistor stabilization in the emitter circuit, a MOSFET is used as a voltage controlled current source thereby stabilizing the emission current and resulting in low voltage switching. In this device, the emitter electrode of the field emission array is the drain of the MOSFET. The device operates by controlling the electron supply to the emission surface through the inversion layer density in the channel region of the MOSFET. However, the device is only effective in reducing noise when the MOSFET is biased in the saturation regime. Our devices were fabricated using isotropic etching, oxidation sharpening and chemical mechanical polishing.
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